Chambergard™ Fast Vent Diffusers
Dramatically reduces particles and vent times in load lock and transfer chambers
● Increase system throughput by minimizing load lock vent cycle time
● Provides rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber
● Combines flow characteristics of a diffuser with a high-efficiency filter to increase efficiency and throughput
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Specifications：
Dramatically reduces particles and vent times in load lock and transfer chambers
● Increase system throughput by minimizing load lock vent cycle time
● Provides rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber
● Combines flow characteristics of a diffuser with a high-efficiency filter to increase efficiency and throughput
Download：
Specifications：
| Materials: |
Diffuser element: Patented, sintered nickel membrane filter Housing: 316L stainless steel Surface finish internal: <=32 μin Ra |
| Performance: |
Downstream cleanliness: Cleanliness less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm at rated flow Removal rating: >=0.003 μm Reliability: 100,000 cycle reliability at maximum rated inlet pressure at 25°C (77°F) |
