Planarcore® PVA Brushes for Ontrak® and Ebara®
200 mm and 300 mm equipment
Rapid changeout and high performance for the most critical post CMP clean applications
● Designed to meet the needs of next-generation copper and ILD applications
● Designed with molded-through-the-core construction
Download：
200 mm and 300 mm equipment
Rapid changeout and high performance for the most critical post CMP clean applications
● Designed to meet the needs of next-generation copper and ILD applications
● Designed with molded-through-the-core construction
Download：
